Multiphysics and Multiscale Analysis of MEMS/NEMS

Category: Seminar

Professor Narayan R. Aluru, University of Illinois at Urbana-Champaign. Micro and nanoelectromechanical systems (MEMS and NEMS) are miniaturized sensors, actuators, devices and systems. Micromachined devices such as accelerometers, gyroscopes, pressure sensors, valves, pumps, single-chip …