Events: Details
Multiphysics and Multiscale Analysis of MEMS/NEMS
| Category: | Seminar |
|---|---|
| Description: | Professor Narayan R. Aluru, University of Illinois at Urbana-Champaign. Micro and nanoelectromechanical systems (MEMS and NEMS) are miniaturized sensors, actuators, devices and systems. Micromachined devices such as accelerometers, gyroscopes, pressure sensors, valves, pumps, single-chip microfluidic systems such as chemical analyzers or synthesizers, and many more devices and systems have been designed and fabricated over the last two decades. A popular approach to design MEMS/NEMS is to use external electric fields – also referred to as electrostatic actuation. In this talk, we will first discuss computational studies on electrostatically actuated microelectromechanical systems (MEMS). Electrostatically actuated MEMS are governed by coupled mechanical, electrostatic, and fluidic energy domains. We will present efficient Lagrangian techniques for seamless coupling of all the energy domains. Then, we will show that the nonlinear nature of the electrostatic force can give rise to complex nonlinear dynamics. Uncertainties or stochastic variations in geometry, material properties, etc. can play an important role in MEMS. We will describe computational approaches for treatment of uncertainties in MEMS. In the second part of the talk, we will discuss physical theories for electrostatically actuated nanoelectromechanical systems (NEMS). Since MEMS physical theories can fail for NEMS, we will present hierarchical physical theories as well as multiscale methods for efficient and accurate analysis of electrostatically actuated silicon NEMS. |
| When: |
Friday 15 May 2009, 3:00 PM - 4:00 PM (EST) |
| Where: | Birck 1001, Purdue University |