Gas Damping of Microcantilevers at Low Ambient Pressures
05 Jun 2009 | Online Presentations | Contributor(s): Rahul Anil Bidkar
This seminar will present a theoretical model for predicting the gas damping of long, rectangular silicon microcantilevers, which are oscillating in an unbounded gaseous medium with the ambient pressures varying over 5 orders of magnitude (1000 > Kn > 0.03). The work is the result of a …