You must login before you can run this tool.
Creep deformation in a RF MEMS device
Study creep deformation in a fixed-fixed beam model of an electrically actuated RF MEMS device
Version 2.0 - published on 03 Aug 2011
This tool is closed source.
| Category | Tools |
|---|---|
| Abstract | This tool models the deflection of the metal plate in a RF MEMS device due to the electrostatic force. The metal plate is supported by four straight beams and their deflections are solved using Bernoulli’s beam theory and assuming that the plate remains flat. n this device a constant applied voltage causes a progressively increasing deflection of the beam due to creep deformation. Elastic properties, geometrical parameters, residual tensile stress and applied voltage can be varied to obtain various responses. The output includes the time evolution of the gap and the profile of the legs supporting the plate. |
| Credits | This work was funded by NNSA Center for Prediction of Reliability, Integrity and Survivability of Microsystems (Purdue PRISM center). MEMS pictures by Peter Kolis. |
| Powered by | Beam model with creep code, written in fortran, designed by Koslowski and Strachan. |
| Cite this work | Researchers should cite this work as follows: |