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Creep deformation in a RF MEMS device

By Diego Cifuentes, Guillermo Andres Roman, Marisol Koslowski, Alejandro Strachan, Gabriela Venturini

Purdue University

Study creep deformation in a fixed-fixed beam model of an electrically actuated RF MEMS device

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Version 2.0 - published on 03 Aug 2011

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