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Coarse-grained Model for RF MEMS Device
Simple model for beam deflection as a function of time for an RF MEMS device
Version 2.0 - published on 24 Feb 2011
This tool is closed source.
| Category | Tools |
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| Abstract | This is the coarse-grained model of the RF MEMS device under study by the Purdue University center for Prediction of Reliability, Integrity and Survivability of Microsystems (PRISM). This simple model computes the deflection of a beam suspended between two contacts. It includes a simple model for fluid damping due to the surrounding atmosphere, but it is missing detailed physics for electrostatics, granular structure of materials, etc. It is used to get a rough sense of how a device would perform before launching the MEMOSA code to compute a more precise result. |
| Credits | Thanks to Guoheng Chen and Michael McLennan for helping to create the Rappture interface for this tool. |
| Cite this work | Researchers should cite this work as follows: |
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